Article Title: Gas-compensated thermal flow sensor using an integrated velocity-independent gas properties meter
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-08-30
Date Accepted: 2024-12-03
Online publication date: 2024-12-13