Chu, Qingbo https://orcid.org/0009-0008-8593-1125
Xia, Dunzhu
Li, Jinhui
Zhang, Qiyuan
Yang, Xiuhua https://orcid.org/0000-0001-8261-7220
Funding for this research was provided by:
China’s National Natural Science Foundation (61871125)
Article Title: Monolithic, fully-differential triaxial accelerometer with low nonlinearity and cross-axis sensitivity
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2024-09-19
Date Accepted: 2025-01-06
Online publication date: 2025-01-23