Elshenety, Ahmad https://orcid.org/0000-0002-5783-4669
Mintas Kucuk, Merve https://orcid.org/0009-0005-5601-6313
Yilmaz, Mehmet https://orcid.org/0000-0001-5496-6212
Funding for this research was provided by:
Bilkent University UNAM (Bilkent University UNAM Graduate Scholarship for M)
Article Title: High thickness material lift-off using multi-layer photoresist
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-10-23
Date Accepted: 2025-01-21
Online publication date: 2025-02-06