Chen, Shitao https://orcid.org/0000-0001-5035-9722
Su, Yu https://orcid.org/0009-0002-8490-4359
Yin, Qiupeng
Zhou, Jie
Li, Weichen
Zhao, Yunong https://orcid.org/0000-0003-2439-8669
He, Kaixuan
Guo, Xiaohui https://orcid.org/0000-0002-0202-866X
Funding for this research was provided by:
University Synergy Innovation Program of Anhui Province (GXXT-2023-002)
National Natural Science Foundation of China (2022A573)
Postdoctoral Foundation of Anhui Province (2022A573)
Article Title: Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2024-10-18
Date Accepted: 2025-03-07
Online publication date: 2025-03-17