Zhang, Yimei https://orcid.org/0009-0009-2719-4777
Quenzer, Hans-Joachim
Jensen, Björn
Müller-Groeling, Axel
Funding for this research was provided by:
federal ministry of education and research (03VP10831)
Article Title: Development of crystallized thick, highly doped a-Si:H layers for surface micromachining of MEMS inertial sensors
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-02-21
Date Accepted: 2025-05-14
Online publication date: 2025-06-02