Jin, Yiming https://orcid.org/0009-0000-2563-864X
Ma, Zhipeng https://orcid.org/0000-0003-2891-3410
Li, Mingkang
Zhou, Tao
Dong, Leinuo https://orcid.org/0009-0002-7280-1635
Jin, Zhonghe https://orcid.org/0000-0002-2039-1390
Funding for this research was provided by:
National Natural Science Foundation of China (62374145)
Article Title: A single-axis and three-electrode MEMS accelerometer with linear output and zero-stiffness
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2025-02-17
Date Accepted: 2025-05-27
Online publication date: 2025-06-05