Chen, Jiarui https://orcid.org/0009-0000-8399-6875
Guo, Yahui
Guan, Jinbang
Wang, Fengjiao
Zong, Yuan
Zhao, Ling
Dai, Gance
Funding for this research was provided by:
Science and Technology Plan for Industrial and Agricultural Projects, ZheJiang, China (2021004)
Article Title: Numerical simulation of wet etching for R angle of fine metal mask
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2025-03-19
Date Accepted: 2025-06-04
Online publication date: 2025-06-12