Li, Chen https://orcid.org/0000-0001-9442-1014
Yang, Xuan https://orcid.org/0009-0001-9703-4447
Chen, Shuai https://orcid.org/0009-0002-2781-519X
Funding for this research was provided by:
National Nature Science Foundation of China (52175540,61705124)
Key Research and Development Program Project of Shaanxi Province (2025GH-YBXM-003)
Key Scientific Research Project of the Education Department of Shaanxi Province (24JR042)
China Postdoctoral Science Foundation (2020M673382202116)
Article Title: MEMS electromagnetic micro scanning mirrors for LiDAR applications
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2025 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-04-09
Date Accepted: 2025-06-05
Online publication date: 2025-06-18