Hung, Shao-Yang
Lin, Zhong-Wei
Fujita, Hiroyuki https://orcid.org/0009-0008-8400-6122
Li, Sheng-Shian https://orcid.org/0000-0003-4727-8870
Chen, Chihchen https://orcid.org/0000-0002-2195-4802
Kitamori, Takehiko https://orcid.org/0000-0003-2969-6550
Morikawa, Kyojiro https://orcid.org/0000-0002-9163-9373
Funding for this research was provided by:
National Science and Technology Council (NSTC111-2622-8-007-012)
Article Title: Noncontact MEMS thermal flow sensors integrated in glass microfluidic chemical chip
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-03-29
Date Accepted: 2025-06-05
Online publication date: 2025-06-23