Ma, Zhichao https://orcid.org/0009-0009-1484-3467
Guo, Qiuquan
Yang, Jun
Yang, Guangyao https://orcid.org/0000-0001-9644-1502
Deng, Kun
Zhang, Naibo https://orcid.org/0009-0001-9275-6539
Funding for this research was provided by:
Shenzhen Science and Technology Program (JCYJ20210324123202008)
Article Title: Design and fabrication of a novel compact RF MEMS series capacitive switch with reduced warping
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2025 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-01-26
Date Accepted: 2025-06-13
Online publication date: 2025-06-23