Syms, R R A https://orcid.org/0000-0003-0901-8314
Article Title: Sidewall transfer lithography: applications in nanofabrication and nanotechnology
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-02-26
Date Accepted: 2025-07-04
Online publication date: 2025-07-16