Funding for this research was provided by:
The Science and Technology Support Plan (Social Development) Project of Taizhou City (TS202328)
The Scientific Research Start-up Foundation for High-level Talents of Taizhou University (TZXY2022QDJJ005)
Jiangsu Province Higher Education Basic Science (Natural Science) Research General Project (23KJB460029)
Article Title: Research on the measurement of wet etching rates and Level Set simulation of patterned sapphire substrates
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2025-04-19
Date Accepted: 2025-08-29
Online publication date: 2025-09-10