Tang, Rui https://orcid.org/0009-0007-3906-2857
Zhang, Jinwen
Du, Jianyu https://orcid.org/0009-0004-2379-9369
Wang, Wei
Article Title: Diamond ICP-DRIE etching technology with PECVD SiO 2 as mask
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2025-07-08
Date Accepted: 2025-10-17
Online publication date: 2025-11-03