Huang, Yantao https://orcid.org/0009-0008-9009-3138
Liu, Yushuai
Funding for this research was provided by:
National Key Research and Development Program of China (2024YFB3614104)
Natural Science Foundation of Shanghai (23ZR1442400)
Jiangsu Provincial Key Research and Development Program (BE2023048)
Article Title: Characteristic of LiNbO 3 thin film ICP etching for micro/nano fabrication
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2026 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-12-06
Date Accepted: 2026-01-12
Online publication date: 2026-03-05