Bao, Aocheng https://orcid.org/0009-0009-1832-1973
Yang, Chong https://orcid.org/0009-0009-8172-2358
Sheng, Bowen
Zhang, Haixia
Yu, Dunshan
Lu, Yipeng https://orcid.org/0000-0002-3436-3243
Funding for this research was provided by:
National Key Research and Development Program (2023YFB3211200)
National Natural Science Foundation of China (62471008)
Article Title: A high coupling-efficiency actuator fabricated by a wafer level piezoelectric MEMS process with optimized multilayers and improved thermal budget
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2025-08-31
Date Accepted: 2026-02-27
Online publication date: 2026-03-24