Li, Yujiang
Wang, Qi https://orcid.org/0009-0002-5999-9712
Shao, Guanzong
Chen, Lipin
Sang, Lina https://orcid.org/0000-0002-6663-1265
Yi, Zhiran https://orcid.org/0000-0002-8679-8302
Zhao, Jinshi https://orcid.org/0000-0001-6544-8672
Funding for this research was provided by:
Tianjin Municipal Enterprise Science and Technology Commissioner Project (25YDTPJC00540)
National Natural Science Foundation of China (52302339)
Beijing-Tianjin-Hebei Natural Science Foundation Cooperation Project (25JJJC0011)
Natural Science Foundation of Tianjin City (24JCYBJC00790)
Article Title: A nested cantilever piezoelectric MEMS speaker
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2026-02-05
Date Accepted: 2026-04-15
Online publication date: 2026-04-27