Bobzin, K
Bagcivan, N
Theiß, S
Brugnara, R
Bibinov, N
Awakowicz, P
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Characterization of DC magnetron plasma in Ar/Kr/N2mixture during deposition of (Cr,Al)N coating
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-09-13
Date accepted: 2016-11-18
Online publication date: 2017-01-24