Britun, Nikolay
Belosludtsev, Alexandr
Silva, Tiago
Snyders, Rony
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-10-29
Date accepted: 2016-12-29
Online publication date: 2017-01-25