Jia, Wen-Zhu
Wang, Xi-Feng
Song, Yuan-Hong
Wang, You-Nian
Funding for this research was provided by:
National Natural Science Foundation of China (11275038, 11675036)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Two-dimensional fluid simulation on transient behavior and plasma uniformity in pulsed RF CCP sustained in SiH4 /N2/O2
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-12-02
Date accepted: 2017-02-23
Online publication date: 2017-03-27