Polaki, S R
Ganesan, K
Srivastava, S K
Kamruddin, M
Tyagi, A K
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: The role of substrate bias and nitrogen doping on the structural evolution and local elastic modulus of diamond-like carbon films
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-01-03
Date accepted: 2017-03-06
Online publication date: 2017-03-31