Miyazoe, Hiroyuki
Jagtiani, Ashish V
Tsai, Hsin-Yu
Engelmann, Sebastian U
Joseph, Eric A
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Highly selective dry etching of polystyrene-poly(methyl methacrylate) block copolymer by gas pulsing carbon monoxide-based plasmas
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-01-13
Date accepted: 2017-03-23
Online publication date: 2017-04-21