Chang, Jeffrey
Chang, Jane P
Funding for this research was provided by:
National Science Foundation (CTS-0317449, CTS-9985511)
Microelectronics Advanced Research Corporation (Functional Accelerated nanoMaterial)
William F. Seyer Chair (William F. Seyer Chair)
Journal title: Journal of Physics D: Applied Physics
Article type: rev
Article title: Achieving atomistic control in materials processing by plasma–surface interactions
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-01-31
Date accepted: 2017-05-09
Online publication date: 2017-06-06