Eriguchi, Koji
Journal title: Journal of Physics D: Applied Physics
Article type: rev
Article title: Modeling of defect generation during plasma etching and its impact on electronic device performance—plasma-induced damage
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-02-27
Date accepted: 2017-05-26
Online publication date: 2017-07-20