Hippler, R
Cada, M
Stranak, V
Hubicka, Z
Helm, C A
Funding for this research was provided by:
Czech Science Foundation
German Academic Exchange Service (DAAD)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Pressure dependence of Ar${\hspace{0pt}}_2^+$ , ArTi+, and Ti${\hspace{0pt}}_2^+$ dimer formation in a magnetron sputtering discharge
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-04-18
Date accepted: 2017-09-11
Online publication date: 2017-10-10