Lee, J Y
Kim, D W
Kang, W S https://orcid.org/0000-0003-0047-4997
Lee, J O
Hur, M https://orcid.org/0000-0002-6355-2182
Han, S H
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Growth mechanism of Al2O3 film on an organic layer in plasma-enhanced atomic layer deposition
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-09-28
Date accepted: 2017-11-09
Online publication date: 2017-11-30