Ding, Zi-Jun
Wang, Yong-Ping
Liu, Wen-Jun
Ding, Shi-Jin https://orcid.org/0000-0002-5766-089X
Baklanov, Mikhail R
Zhang, David Wei
Funding for this research was provided by:
National Key Technologies R&D Program of China (2011ZX02703-004)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Characterization of PECVD ultralow dielectric constant porous SiOCH films using triethoxymethylsilane precursor and cinene porogen
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2017-11-08
Date accepted: 2018-02-12
Online publication date: 2018-02-23