Gupta, Dhanoj
Choi, Heechol
Kwon, Deuk-Chul
Yoon, Jung-Sik
Song, Mi-Young https://orcid.org/0000-0002-3045-1465
Funding for this research was provided by:
National Fusion Research Institute (NFRI), Korea
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Electron induced ionization of plasma processing gases: C4Fx(x = 1–8) and the isomers of C4F6and C4F8
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-01-09
Date accepted: 2018-02-23
Online publication date: 2018-03-22