Chen, Wanghua https://orcid.org/0000-0001-6167-3178
Maurice, Jean-Luc https://orcid.org/0000-0002-5005-7174
Vanel, Jean-Charles
Roca i Cabarrocas, Pere https://orcid.org/0000-0003-2241-2762
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Powder free PECVD epitaxial silicon by plasma pulsing or increasing the growth temperature
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-02-16
Date accepted: 2018-05-02
Online publication date: 2018-05-16