Starinskiy, Sergey V
Bulgakov, Alexander V https://orcid.org/0000-0002-9651-1328
Gatapova, Elizaveta Ya https://orcid.org/0000-0002-8152-6690
Shukhov, Yuri G
Sulyaeva, Veronica S https://orcid.org/0000-0001-6940-057X
Timoshenko, Nikolay I
Safonov, Alexey I https://orcid.org/0000-0003-1410-2705
Funding for this research was provided by:
Russian Science Foundation (16-19-10675)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-02-27
Date accepted: 2018-05-18
Online publication date: 2018-06-05