Zotovich, A https://orcid.org/0000-0002-0811-6994
Rezvanov, A https://orcid.org/0000-0002-1677-9122
Chanson, R
Zhang, L
Hacker, N
Kurchikov, K
Klimin, S
Zyryanov, S M https://orcid.org/0000-0003-1438-3631
Lopaev, D
Gornev, E
Clemente, I
Miakonkikh, A
Maslakov, K
Funding for this research was provided by:
Russian Science Foundation (16-12-10361)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-02-12
Date accepted: 2018-07-02
Online publication date: 2018-07-19