Gozhyk, Iryna https://orcid.org/0000-0002-8287-307X
Dai, Letian
Hérault, Quentin
Lazzari, Rémi
Grachev, Sergey
Funding for this research was provided by:
Agence Nationale de la Recherche (ANR-15-CHIN-0003)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Plasma emission correction in reflectivity spectroscopy during sputtering deposition
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-07-26
Date accepted: 2018-11-28
Online publication date: 2018-12-28