Wang, Ruixue https://orcid.org/0000-0002-0850-0857
Xu, Hui
Zhao, Yong
Zhu, Weidong
Ostrikov, Kostya (Ken) https://orcid.org/0000-0001-8672-9297
Shao, Tao https://orcid.org/0000-0002-5738-1241
Funding for this research was provided by:
State Key Laboratory of Power System of Tsinghua University (SKLD17KM06)
National Natural Science Foundation of China (11575194)
Article Title: Effect of dielectric and conductive targets on plasma jet behaviour and thin film properties
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2018-08-14
Date Accepted: 2018-11-29
Online publication date: 2018-12-13