Mao, Shujuan
Funding for this research was provided by:
The Youth Innovation Promotion Association of CAS (2015097)
The National Key Project of Science and Technology of China (2017ZX02315001)
Article Title: Titanium-based ohmic contacts in advanced CMOS technology
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2018-08-28
Date Accepted: 2019-08-22
Online publication date: 2019-09-17