von Wezyk, Alexander
Andrianov, Konstantin
Wilhein, Thomas
Bergmann, Klaus https://orcid.org/0000-0002-4483-8943
Article Title: Target materials for efficient plasma-based extreme ultraviolet sources in the range of 6 to 8 nm
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd
Publication dates
Date Received: 2019-06-26
Date Accepted: 2019-09-10
Online publication date: 2019-10-04