Zhang, Xiaoli https://orcid.org/0000-0003-3934-9296
Yu, Lu https://orcid.org/0000-0002-3342-4956
Guo, Qing
Li, Dachao
Zhang, Hui
Yu, Haixia
Funding for this research was provided by:
National Natural Science Foundation of China (81571766, 61771337)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Resonance frequency analysis of a dual-frequency capacitive micromechanical ultrasonic transducer for detecting high and low pressures simultaneously with high sensitivity and linearity
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2019-06-19
Date accepted: 2019-10-16
Online publication date: 2019-11-01