Zhang, Bin https://orcid.org/0000-0001-8126-8073
Zhang, Xiaobing
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Electron energy distribution functions relevant for weakly ionized SiH4–H2plasma
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2019-08-22
Date accepted: 2019-12-16
Online publication date: 2020-01-03