Zhang, Bin https://orcid.org/0000-0001-8126-8073
Zhang, Xiaobing
Article Title: Electron energy distribution functions relevant for weakly ionized SiH 4 –H 2 plasma
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2019-08-22
Date Accepted: 2019-12-16
Online publication date: 2020-01-03