Sang, Xia
Chang, Jane P https://orcid.org/0000-0001-8482-5744
Funding for this research was provided by:
National Science Foundation (1805112)
Lam Research Corporation
Semiconductor Research Corporation
Center of Design-Enabled Nanofabrication
Journal title: Journal of Physics D: Applied Physics
Article type: rev
Article title: Physical and chemical effects in directional atomic layer etching
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2019-09-02
Date accepted: 2020-01-20
Online publication date: 2020-02-25