Sang, Xia
Chang, Jane P https://orcid.org/0000-0001-8482-5744
Funding for this research was provided by:
National Science Foundation (1805112)
Lam Research Corporation
Semiconductor Research Corporation
Center of Design-Enabled Nanofabrication
Article Title: Physical and chemical effects in directional atomic layer etching
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-09-02
Date Accepted: 2020-01-20
Online publication date: 2020-02-25