Funding for this research was provided by:
Carl Zeiss SMT GmbH
Provincie Overijssel
Stichting voor de Technische Wetenschappen
ASML
Article Title: Comparative H diffusion measurement through metal and non-metal nano-layers using optical sensing
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd
Publication dates
Date Received: 2020-02-26
Date Accepted: 2020-05-19
Online publication date: 2020-07-01