Hoppe, C https://orcid.org/0000-0002-6539-0885
Mitschker, F
Butterling, M
Liedke, M O https://orcid.org/0000-0001-7933-7295
de Los Arcos, T
Awakowicz, P
Wagner, A
Grundmeier, G
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (SFB-TR87)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Characterisation of micropores in plasma deposited SiO x films by means of positron annihilation lifetime spectroscopy
Copyright information: © 2020 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date received: 2020-04-10
Date accepted: 2020-07-23
Online publication date: 2020-09-03