Alcala, Ruben https://orcid.org/0000-0003-2799-9793
Richter, Claudia
Materano, Monica
Lomenzo, Patrick D
Zhou, Chuanzhen
Jones, Jacob L
Mikolajick, Thomas
Schroeder, Uwe
Funding for this research was provided by:
Bundesministerium für Wirtschaft und Energie (16IPCEI310)
State of North Carolina and National Science Foundation (ECCS-1542015)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films
Copyright information: © 2020 The Author(s). Published by IOP Publishing Ltd
License information: CC BY 4.0 Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 license. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publication dates
Date received: 2020-07-22
Date accepted: 2020-09-29
Online publication date: 2020-10-22