Funding for this research was provided by:
Busan Metropolitan City and Busan Techno Park (P0012451)
Article Title: Two-dimensional fluid simulation of pulsed-power inductively coupled Ar/H 2 discharge
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2020-10-05
Date Accepted: 2021-01-14
Online publication date: 2021-02-08