Hata, Kazufumi https://orcid.org/0000-0001-7326-3395
Tanaka, Yasunori https://orcid.org/0000-0002-0796-2507
Kano, N
Nakano, Y https://orcid.org/0000-0002-7718-7446
Ishijima, T https://orcid.org/0000-0002-5237-3699
Article Title: Influence of current modulation waveform on polycrystalline diamond film deposition using modulated induction thermal plasmas—numerical and experimental studies
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-12-10
Date Accepted: 2021-01-28
Online publication date: 2021-02-24