Popov, V P https://orcid.org/0000-0002-7415-1405
Antonov, V A
Tikhonenko, F V
Tarkov, S M
Gutakovskii, A K
Tyschenko, I E
Miakonkikh, A V https://orcid.org/0000-0002-9547-1619
Lomov, A A
Rogozhin, A E
Rudenko, K V
Funding for this research was provided by:
Russian Foundation for Basic Research (19-29-03031)
Article Title: Robust semiconductor-on-ferroelectric structures with hafnia–zirconia–alumina UTBOX stacks compatible with CMOS technology
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2020-12-21
Date Accepted: 2021-02-16
Online publication date: 2021-03-08