Volmer, Frank https://orcid.org/0000-0003-3526-2687
Seidler, Inga
Bisswanger, Timo https://orcid.org/0000-0001-8147-4010
Tu, Jhih-Sian
Schreiber, Lars R https://orcid.org/0000-0003-0904-9612
Stampfer, Christoph https://orcid.org/0000-0002-4958-7362
Beschoten, Bernd https://orcid.org/0000-0003-2359-2718
Funding for this research was provided by:
Horizon 2020 Framework Programme (881603 (Graphene Flagship))
Deutsche Forschungsgemeinschaft (BE 2441/9-1)
Article Title: How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2020-11-13
Date Accepted: 2021-02-22
Online publication date: 2021-03-09