Chen, Qingqing https://orcid.org/0000-0002-4519-7148
Yang, Shaoyan
Li, Chengming
Yao, Weizhen https://orcid.org/0000-0001-7064-8628
Liu, Xianglin
Niu, Huidan
Yang, Rui
Li, Huijie
Wei, Hongyuan
Wang, Lianshan https://orcid.org/0000-0002-9145-458X
Wang, Zhanguo
Funding for this research was provided by:
National Natural Science Foundation of China (No. 51727901)
Article Title: MOCVD growth of ZrN thin films on GaN/Si templates and the effect of substrate temperature on growth mode, stress state, and electrical properties
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-05-02
Date Accepted: 2022-07-18
Online publication date: 2022-08-02