Kwon, Deuk-Chul https://orcid.org/0000-0002-9358-9365
Yook, Yeong-Geun
Chung, Sang-Young
Chang, Won-Seok
Yu, Dong-Hun
Im, Yeon-Ho https://orcid.org/0000-0002-0085-8213
Funding for this research was provided by:
National Research Council of Science Technology
Korean government (CAP-17–02-NFRI)
Korea government (CRC-20-01-NFRI)
Article Title: Spatially averaged ion temperature model for low-temperature plasma sources
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2022-04-14
Date Accepted: 2022-08-03
Online publication date: 2022-08-18