Liu, Xiaoshuang
Wang, Rong https://orcid.org/0000-0003-3333-0180
Zhang, Junran
Lu, Yunhao
Zhang, Yiqiang
Yang, Deren
Pi, Xiaodong https://orcid.org/0000-0002-4233-6181
Funding for this research was provided by:
“Pioneer” and “Leading Goose” R&D Program of Zhejiang (2022C01021)
Natural Science Foundation of China for Innovative Research Groups (61721005)
Fundamental Research Funds for the Central Universities (2018XZZX003-02)
Natural Science Foundation of China (61774133)
National Key Research and Development Program of China (2018YFB2200101)
Article Title: Anisotropic deformation of 4H-SiC wafers: insights from nanoindentation tests
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2022-06-16
Date Accepted: 2022-09-27
Online publication date: 2022-10-27