Chouteau, S https://orcid.org/0000-0001-8251-9735
Mitronika, M https://orcid.org/0000-0002-2918-2579
Goullet, A https://orcid.org/0000-0001-5411-4351
Richard-Plouet, M https://orcid.org/0000-0002-7871-2919
Stafford, L https://orcid.org/0000-0003-0647-543X
Granier, A https://orcid.org/0000-0002-1054-8139
Funding for this research was provided by:
Université de Montréal
Centre National de la Recherche Scientifique
Université de Nantes
Article Title: Kinetics driving nanocomposite thin-film deposition in low-pressure misty plasma processes
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2022-07-12
Date Accepted: 2022-10-17
Online publication date: 2022-11-08