Gergs, Tobias https://orcid.org/0000-0001-5041-2941
Mussenbrock, Thomas https://orcid.org/0000-0001-6445-4990
Trieschmann, Jan https://orcid.org/0000-0001-9136-8019
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (138690629)
Article Title: Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N2 discharges on experimental timescales
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2023-01-10
Date Accepted: 2023-03-02
Online publication date: 2023-03-24