Ko, Jungmin
Bae, Jinkyu
Park, Minho https://orcid.org/0000-0002-4103-5045
Jo, Younghyun
Lee, Hyunjae
Kim, Kyunghyun
Yoo, Suyoung
Nam, Sang Ki https://orcid.org/0000-0002-3038-2922
Sung, Dougyong
Kim, Byungjo https://orcid.org/0000-0002-5361-5610
Article Title: Computational approach for plasma process optimization combined with deep learning model
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2023-01-31
Date Accepted: 2023-05-03
Online publication date: 2023-05-15